
METHODS AND MEANS FOR AUTOMATED MONITORING OF THIN FILM INDICATORS
Author(s) -
O. V. Maksimova,
П. В. Николаев,
M.K. Samokhvalov
Publication year - 2019
Publication title -
avtomatizaciâ processov upravleniâ
Language(s) - English
Resource type - Journals
ISSN - 1991-2927
DOI - 10.35752/1991-2927-2019-4-58-105-112
Subject(s) - computer science , materials science , environmental science