Open AccessFormation of SiC by Vacuum Carbidization on Porous Silicon
Author(s) -
M. V. Labanok,
S. L. Prakopyeu,
Siarhei Zavatski,
V. P. Bondarenko,
П. И. Гайдук
Publication year - 2022
Publication title -
doklady belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Language(s) - English
Resource type - Journals
eISSN - 2708-0382
pISSN - 1729-7648
DOI - 10.35596/1729-7648-2022-20-6-14-22
Subject(s) - materials science , silicon , silicon carbide , porous silicon , substrate (aquarium) , nanocrystalline silicon , scanning electron microscope , porosity , layer (electronics) , mesoporous material , crystallite , epitaxy , composite material , crystalline silicon , metallurgy , chemistry , amorphous silicon , biochemistry , oceanography , geology , catalysis