Open AccessInfluence of annealing on structure, phase and electrophysical properties of vanadium oxide films
Author(s) -
Т. Д. Нгуен,
А. И. Занько,
Д. А. Голосов,
С. М. Завадский,
С. Н. Мельников,
В. В. Колос,
Theany To
Publication year - 2021
Publication title -
doklady belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Language(s) - English
Resource type - Journals
eISSN - 2708-0382
pISSN - 1729-7648
DOI - 10.35596/1729-7648-2021-19-3-22-30
Subject(s) - annealing (glass) , materials science , crystallite , amorphous solid , crystallization , analytical chemistry (journal) , monoclinic crystal system , vanadium oxide , oxide , electrical resistivity and conductivity , sputter deposition , vanadium , oxygen , crystal structure , crystallography , chemical engineering , thin film , sputtering , chemistry , metallurgy , nanotechnology , organic chemistry , electrical engineering , engineering