Open AccessElectron-microscope investigations of the Pt-Si system during its rapid thermal treatment
Author(s) -
В. А. Солодуха,
В. А. Пилипенко,
Ф. Ф. Комаров,
В. А. Горушко
Publication year - 2020
Publication title -
doklady belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Language(s) - English
Resource type - Journals
eISSN - 2708-0382
pISSN - 1729-7648
DOI - 10.35596/1729-7648-2020-18-3-88-96
Subject(s) - materials science , microstructure , halogen lamp , silicide , platinum , annealing (glass) , transmission electron microscopy , thermal treatment , wafer , metallurgy , analytical chemistry (journal) , sputtering , silicon , composite material , thin film , nanotechnology , optics , chemistry , biochemistry , physics , chromatography , catalysis