Open AccessComparaciones ópticas y estructurales de las películas de Óxido de Silicio rico en Silicio (SRO) depositadas por las técnicas LPCVD y HFCVD
Author(s) -
Haydée Patricia Martínez Hernández,
José Alberto Luna López,
A. Luna-Flores,
José Álvaro David Hernández de la Luz
Publication year - 2019
Publication title -
revista de sistemas experimentales
Language(s) - Spanish
Resource type - Journals
ISSN - 2410-3950
DOI - 10.35429/joes.2019.21.6.19.25
Subject(s) - high resolution transmission electron microscopy , materials science , photoluminescence , chemical vapor deposition , scanning electron microscope , fourier transform infrared spectroscopy , analytical chemistry (journal) , spectroscopy , transmission electron microscopy , silane , nanotechnology , optoelectronics , optics , chemistry , physics , composite material , quantum mechanics , chromatography
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