Open AccessStudies and Research on Obtaining Multifunctional Thin Films by Magnetron-Assisted PVD Process
Author(s) -
Simona Boiciuc
Publication year - 2021
Publication title -
the annals of "dunărea de jos" university of galaţi. fascicle ix, metallurgy and material science
Language(s) - English
Resource type - Journals
eISSN - 2668-4756
pISSN - 2668-4748
DOI - 10.35219/mms.2021.3.04
Subject(s) - materials science , cavity magnetron , thin film , sputter deposition , physical vapor deposition , characterization (materials science) , corrosion , process (computing) , optoelectronics , high power impulse magnetron sputtering , metallurgy , engineering physics , electronic engineering , nanotechnology , computer science , sputtering , engineering , operating system
The paper aims to obtain thin films of nickel and zinc through the magnetron-assisted spraying process and their characterization from a structural point of view, of electrical, optical properties and corrosion resistance. It was found that as the intensity and discharge power increase, changes occur in the structure and properties of the deposited films.