Open AccessCuO Films Obtained by Oxidation of Cu Layers Deposited by the PVD Process - Magnetron Sputtering
Author(s) -
Simona Boiciuc,
Dunărea de Jos
Publication year - 2020
Publication title -
the annals of "dunărea de jos" university of galaţi. fascicle ix, metallurgy and material science
Language(s) - English
Resource type - Journals
eISSN - 2668-4756
pISSN - 2668-4748
DOI - 10.35219/mms.2020.3.03
Subject(s) - materials science , cavity magnetron , sputter deposition , thin film , copper , sputtering , physical vapor deposition , argon , high power impulse magnetron sputtering , metallurgy , composite material , analytical chemistry (journal) , nanotechnology , chemistry , organic chemistry , chromatography
The experimental research carried out and described in this paper aimed to obtain thin films from copper oxides and their characterization from the structural point of view and the optical and electrical properties. To obtain the copper films, a PVD spray deposition system was used, consisting of a vacuum chamber with a capacity of 2 liters, a planar magnetron with ferrite magnets (40x22x9) neodymium (15x8), a vacuum pump with sliding blades, a variable source of direct current of voltage 100 - 600 volts. The atmosphere used for plasma maintenance during deposition was argon rarefied in a pressure range between 3·10-2 - 8·10-3 mbar. The deposits were made on glass plates. The films thus obtained were subsequently subjected to oxidation at temperatures of 200, 300 and 450 °C. It was found that the transparency of the films increases with the oxidation temperature from 1.464 * 10-4 for 200 ºC to 0.5 for 450 ºC and the surface electrical resistance also increases from 0.984 Ώ for 200 ºC to 3882857,1428 Ώ for 450 ºC. With increasing spray power, transparency and surface strength decrease.