Open AccessION-BEAM PROCESSING OF METAL MATERIALS FOR PRECISION EQUIPMENT
Author(s) -
Yu. P. Serdobintsev,
М. П. Кухтик
Publication year - 2020
Publication title -
izvestiâ volgogradskogo gosudarstvennogo tehničeskogo universiteta
Language(s) - English
Resource type - Journals
ISSN - 1990-5297
DOI - 10.35211/1990-5297-2020-8-243-53-55
Subject(s) - polishing , grinding , ion beam , materials science , focused ion beam , beam (structure) , ion , mechanical engineering , process engineering , metallurgy , engineering , chemistry , structural engineering , organic chemistry
The tests have been carried out with the aim of determination of grinding and polishing of various materials with the help of ion-beam processing. The obtained results can be used of development of methodical and technological basics of ion-beam grinding and its application in precision engineering.