Open AccessPULSE MODULATION AS A WAY TO IMPROVE THE QUALITY OF PLASMA COATINGS
Author(s) -
Anvar Kadirmetov,
Vladimir Buhtoyarov,
П. И. Попов
Publication year - 2020
Publication title -
voronežskij naučno-tehničeskij vestnik
Language(s) - English
Resource type - Journals
ISSN - 2311-8873
DOI - 10.34220/2311-8873-2020-3-3-140-142
Subject(s) - modulation (music) , plasma , pulse (music) , materials science , quality (philosophy) , sputtering , optoelectronics , pulse width modulation , optics , physics , nanotechnology , electrical engineering , acoustics , engineering , thin film , voltage , quantum mechanics , detector
The article discusses methods for pulse modulation of electrical parameters during plasma sputtering. The advantages and disadvantages of modulation are considered.