Open AccessThrough-wafer interrogation of MEMS device motion
Author(s) -
Jeremy Dawson
Publication year - 1999
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.33915/etd.967
Subject(s) - microelectromechanical systems , wafer , interrogation , resonator , materials science , focus (optics) , electronic engineering , computer science , engineering , optoelectronics , optics , physics , archaeology , history
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