Open AccessThrough-wafer interrogation of MEMS device motion
Author(s) -
Jeremy Dawson
Publication year - 2019
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.33915/etd.967
Subject(s) - microelectromechanical systems , wafer , resonator , interrogation , electronic engineering , materials science , focus (optics) , computer science , engineering , optoelectronics , optics , physics , archaeology , history