Open AccessControl of charged particle dynamics and electron power absorption dynamics utilizing voltage waveform tailoring in capacitively driven radio-frequency plasmas
Author(s) -
Steven Brandt
Publication year - 2020
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.7576
Subject(s) - atomic physics , plasma , argon , electronegativity , chemistry , ion , waveform , plasma cleaning , voltage , materials science , physics , organic chemistry , quantum mechanics