Open AccessDevelopment of surface micromachined Aluminum Nitride air-bridges for piezoelectric MEMS/NEMS applications by Metal Organic Vapor Phase Epitaxy techniques
Author(s) -
Sridhar Kuchibhatla
Publication year - 2019
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.4743
Subject(s) - materials science , nitride , microelectromechanical systems , optoelectronics , piezoelectricity , thin film , nanotechnology , nanoelectromechanical systems , epitaxy , metalorganic vapour phase epitaxy , etching (microfabrication) , layer (electronics) , composite material , nanomedicine , nanoparticle