Open AccessDevelopment of surface micromachined Aluminum Nitride air-bridges for piezoelectric MEMS/NEMS applications by Metal Organic Vapor Phase Epitaxy techniques
Author(s) -
Sridhar Kuchibhatla
Publication year - 2011
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.4743
Subject(s) - materials science , nitride , microelectromechanical systems , optoelectronics , piezoelectricity , nanoelectromechanical systems , thin film , nanotechnology , epitaxy , metalorganic vapour phase epitaxy , etching (microfabrication) , layer (electronics) , composite material , nanomedicine , nanoparticle
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