Open AccessNanofabrication of Optofluidic Photonic Crystal Resonators for Biosensing
Author(s) -
Andagana Junta,
Henry Bolivar
Publication year - 2019
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.3052
Subject(s) - nanolithography , materials science , nanotechnology , etching (microfabrication) , lithography , photonic crystal , photolithography , biosensor , optoelectronics , resist , dry etching , fabrication , microfluidics , reactive ion etching , plasma etching , nanophotonics , electron beam lithography , layer (electronics) , medicine , alternative medicine , pathology