Open AccessNanofabrication of Optofluidic Photonic Crystal Resonators for Biosensing
Author(s) -
Henry Bolivar Andagana Junta
Publication year - 2010
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.3052
Subject(s) - nanolithography , materials science , nanotechnology , etching (microfabrication) , lithography , photonic crystal , biosensor , resist , photolithography , fabrication , optoelectronics , dry etching , microfluidics , plasma etching , reactive ion etching , nanophotonics , electron beam lithography , layer (electronics) , medicine , alternative medicine , pathology
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