Open AccessOptical detection of multiple faults of a MEMS based linear comb resonator
Author(s) -
Lakshmi Deepasree Konduparthi
Publication year - 2005
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.1671
Subject(s) - resonator , microelectromechanical systems , stiffness , asymmetry , comb drive , finite element method , materials science , acoustics , constant (computer programming) , chip , control theory (sociology) , engineering , physics , electronic engineering , structural engineering , computer science , optoelectronics , electrical engineering , medicine , alternative medicine , pathology , quantum mechanics , control (management) , fabrication , artificial intelligence , programming language
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