Open AccessIntegrated through -wafer optical monitoring of MEMS for closed -loop control
Author(s) -
Jeremy Dawson
Publication year - 2002
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.1578
Subject(s) - microsystem , microelectromechanical systems , wafer , electronic engineering , engineering , computer science , waveform , electrical engineering , materials science , optoelectronics , voltage , nanotechnology
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