Open AccessDiffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators
Author(s) -
William McCormick
Publication year - 2019
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.1551
Subject(s) - microelectromechanical systems , lens (geology) , fabrication , microlens , resonator , optics , materials science , electronic engineering , computer science , engineering , optoelectronics , physics , medicine , alternative medicine , pathology