Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators | Zendy

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Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators

Author(s) -

William McCormick

Publication year - 2004

Language(s) - English

Resource type - Dissertations/theses

DOI - 10.33915/etd.1551

Subject(s) - microelectromechanical systems , lens (geology) , fabrication , microlens , optics , materials science , computer science , engineering , electronic engineering , optoelectronics , medicine , physics , alternative medicine , pathology

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