Open AccessDiagnosis of operational changes in microelectromechanical systems via fault detection
Author(s) -
Scott A. Rittenhouse
Publication year - 2004
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.33915/etd.1509
Subject(s) - microelectromechanical systems , reliability (semiconductor) , fault detection and isolation , actuator , residual , fault (geology) , kalman filter , electronic engineering , filter (signal processing) , engineering , computer science , materials science , electrical engineering , optoelectronics , physics , artificial intelligence , power (physics) , algorithm , quantum mechanics , seismology , geology
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