Open AccessParylene MEMS for biomedical applications
Author(s) -
Wei Wang,
Yaoping Liu,
Lingqian Zhang
Publication year - 2017
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04531
Subject(s) - parylene , microelectromechanical systems , materials science , nanotechnology , polymer , biocompatible material , biomedical engineering , composite material , engineering