Open AccessMonolithic MEMS + Photonics Systems
Author(s) -
Sunil A. Bhave
Publication year - 2017
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04405
Subject(s) - resonator , microelectromechanical systems , mechanical resonance , photonics , mechanical system , optomechanics , surface micromachining , materials science , optoelectronics , transducer , acoustics , vibration , electronic engineering , optics , physics , engineering , mechanical engineering , fabrication , medicine , alternative medicine , pathology