Monolithic MEMS + Photonics Systems | Zendy

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Monolithic MEMS + Photonics Systems

Author(s) -

Sunil A. Bhave

Publication year - 2017

Language(s) - Uncategorized

Resource type - Conference proceedings

DOI - 10.3390/optofluidics2017-04405

Subject(s) - microelectromechanical systems , photonics , computer science , optoelectronics , materials science

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