Open Access<strong>FABRICATION OF SILICON SPHERICAL MICROCAVITY BY LASER HEATING ON CHIP</strong>
Author(s) -
Hao Han,
Lenian He,
Yi Zou,
Xiaoping Liu
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04385
Subject(s) - materials science , silicon , silicon on insulator , optoelectronics , etching (microfabrication) , dry etching , infrared , laser , surface roughness , substrate (aquarium) , fabrication , optics , nanotechnology , layer (electronics) , composite material , medicine , physics , alternative medicine , pathology , oceanography , geology