Open Access<strong>FABRICATION OF SILICON SPHERICAL MICROCAVITY BY LASER HEATING ON CHIP</strong>
Author(s) -
Xiaoping Liu,
Hailong Han,
He Li,
Yi Zou
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04385
Subject(s) - fabrication , silicon , materials science , laser , optoelectronics , chip , silicon chip , nanotechnology , optics , physics , electrical engineering , engineering , pathology , medicine , alternative medicine
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