Open Access<strong>Scalable fabrication of single silicon vacancy defect arrays in silicon carbide using focused ion beam</strong>
Author(s) -
Junfeng Wang,
Weibo Gao
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04381
Subject(s) - materials science , silicon carbide , fabrication , focused ion beam , vacancy defect , silicon , optoelectronics , ion beam , photoluminescence , photonics , ion , ion implantation , beam (structure) , optics , condensed matter physics , chemistry , physics , medicine , alternative medicine , organic chemistry , pathology , metallurgy