Open AccessSILICON-ON-GLASS FABRICATION PROCESS FOR OUT-OF-PLANE COMB CAPACITORS
Author(s) -
Zhenchuan Yang
Publication year - 2017
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04237
Subject(s) - capacitor , fabrication , materials science , etching (microfabrication) , comb drive , silicon , optoelectronics , actuator , voltage , thermal conduction , process (computing) , realization (probability) , electrical engineering , nanotechnology , composite material , engineering , computer science , medicine , alternative medicine , pathology , operating system , statistics , mathematics , layer (electronics)