Open AccessSILICON-ON-GLASS FABRICATION PROCESS FOR OUT-OF-PLANE COMB CAPACITORS
Author(s) -
Zhenchuan Yang
Publication year - 2017
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04237
Subject(s) - fabrication , capacitor , silicon , materials science , process (computing) , optoelectronics , electrical engineering , computer science , engineering , voltage , medicine , alternative medicine , pathology , operating system
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