Open Access<strong>Development of a Roll-to-roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication</strong>
Author(s) -
Zhiting Peng,
Tianzhun Wu
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04229
Subject(s) - fabrication , materials science , uv curing , nanotechnology , lithography , ultraviolet , curing (chemistry) , roll to roll processing , photoresist , coating , photolithography , etching (microfabrication) , optoelectronics , composite material , layer (electronics) , medicine , alternative medicine , pathology