Open AccessA NOVEL BONDING METHOD FOR THE FABRICATION OF LARGE-SIZE AND HIGH-THROUGHPUT PDMS MICROFLUIDIC CHIP
Author(s) -
Shuting Xie,
Jun Wu,
Mingliang Jin,
Lingling Shui
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04227
Subject(s) - polydimethylsiloxane , fabrication , materials science , microfluidics , microchannel , microfabrication , anodic bonding , nanotechnology , wafer bonding , chip , wafer , computer science , medicine , telecommunications , alternative medicine , pathology