Open AccessNEMS Actuator Enhanced by Gradient Optical Force with A Large Range
Author(s) -
A. Q. Liu,
J. G. Huang,
Hong Cai,
Yuandong Gu
Publication year - 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/optofluidics2017-04199
Subject(s) - actuator , nanoelectromechanical systems , capacitance , optomechanics , capacitive sensing , optical force , capacitor , materials science , physics , nanotechnology , optoelectronics , optics , electrical engineering , engineering , optical tweezers , voltage , resonator , nanomedicine , electrode , quantum mechanics , nanoparticle
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