Open AccessSTUDY OF FILMS OF TRANSITION METALS AS MATERIALS FOR LASER NANOSTRUCTURING
Author(s) -
Roman I. Kuts,
V. P. Korolkov,
Vladimir N. Khomutov,
A. I. Malyshev,
S. L. Mikerin
Publication year - 2021
Publication title -
interèkspo geo-sibirʹ
Language(s) - English
Resource type - Journals
ISSN - 2618-981X
DOI - 10.33764/2618-981x-2021-8-241-247
Subject(s) - materials science , nanostructure , laser , oxide , thin film , diffraction , transition metal , phase transition , nanotechnology , optics , metallurgy , chemistry , condensed matter physics , physics , biochemistry , catalysis
This paper presents the results of a study of direct laser writing on thin films of transition metals (Hf, Ti, Zr, Ta, V). The films were deposited on fused silica substrates. A comparison of laser writing on the indicated films is carried out from the point of view of the presence of contour writing. As it was proved earlier, when writing on zirconium films, contour writing leads to formation of periodic nanostructures with a period equal to the writing step (250-500 nm). Materials were identified that are promising from the point of view of writing oxide nanostructures for the further formation of the diffraction phase microrelief of DOEs.