Open AccessSTUDY OF DIRECT LASER RECORDING OF MICRO-RELIEF ON A TWO-LAYER a-Si/Ag STRUCTURE
Author(s) -
Nurbek Sydyk uulu,
Askar Asanbekovi Kutanov,
З. М. Казакбаева
Publication year - 2021
Publication title -
interèkspo geo-sibirʹ
Language(s) - English
Resource type - Journals
ISSN - 2618-981X
DOI - 10.33764/2618-981x-2021-8-229-235
Subject(s) - materials science , laser , substrate (aquarium) , layer (electronics) , optoelectronics , silicon , sputter deposition , amorphous solid , semiconductor , absorption (acoustics) , optics , optical recording , wavelength , sputtering , thin film , composite material , nanotechnology , chemistry , oceanography , physics , geology , organic chemistry
This paper presents the results of direct laser recording on a two-layer amorphous silicon / silver structure deposited on a glass substrate by magnetron sputtering. The absorption spectra of a-Si films of various thicknesses and a glass substrate are investigated. A method is proposed for direct laser recording of microstructures by focused radiation of a single-mode semiconductor laser with a wavelength of λ = 405 nm on a two-layer a-Si / Ag medium from the side of a glass substrate. The formation of the micro relief is studied during direct recording by semiconductor laser pulses with λ = 405 nm on the a-Si layer. Parameters of two-layer structure a-Si / Ag for direct laser recording are optimized.