Open AccessDEVELOPMENT AND RESEARCH OF A PRECISION PIEZOELECTRIC Y-COORDINATE DRIVE FOR A CIRCULAR LASER WRITING SYSTEM
Author(s) -
Ruslan V. Shimansky,
V. P. Korolkov,
Anton Kachkin
Publication year - 2019
Publication title -
interèkspo geo-sibirʹ
Language(s) - English
Resource type - Journals
ISSN - 2618-981X
DOI - 10.33764/2618-981x-2019-8-57-63
Subject(s) - rotation (mathematics) , piezoelectricity , laser , coordinate system , path (computing) , development (topology) , laser beams , optics , center (category theory) , acoustics , computer science , physics , mathematics , computer vision , mathematical analysis , chemistry , crystallography , programming language
The paper presents the results of the development and research of a precision piezoelectric Y-coordinate drive for a circular laser writing system. The developed drive is designed to correct the direction of the linear scan path of the recording beam to align it with the center of rotation of the substrate.