Open AccessCALCULATION AND MEASUREMENT OF MEMS PARAMETERS WITH ELECTROMAGNETIC CONTROL
Author(s) -
V. S. Korneyev
Publication year - 2019
Publication title -
interèkspo geo-sibirʹ
Language(s) - English
Resource type - Journals
ISSN - 2618-981X
DOI - 10.33764/2618-981x-2019-8-292-297
Subject(s) - microelectromechanical systems , electromagnetic spectrum , electromagnetic radiation , radiation , computer science , physics , acoustics , electronic engineering , engineering , optics , optoelectronics
The results of theoretical calculations and experimental measurements of MEMS parameters with electromagnetic control are presented. The obtained results are compared with the known ones published in domestic sources. The prospects of the developed devices application as deflectors, scanners, and analyzers of the optical radiation spectrum are indicated.