Open AccessMODELING OF PIEZORESISTIVE CANTILEVERS FOR CHEMICAL SENSING
Author(s) -
K. Durga Aparna,
Rajesh Kanuganti
Publication year - 2020
Publication title -
international journal of engineering applied science and technology
Language(s) - English
Resource type - Journals
ISSN - 2455-2143
DOI - 10.33564/ijeast.2020.v04i12.041
Subject(s) - piezoresistive effect , cantilever , materials science , nanotechnology , biological system , computer science , optoelectronics , composite material , biology
This paper presents and analytical model to provide good results for cantilevers with point load at free end and to describe the micro cantilevers with surface stress. It has been shown that the width of the cantilever has to be increased to optimize the sensitivity. The placement of the piezoresistor was found to be in the centre of the cantilevers clamped end and the area of the piezoresitor should be minimized. Keywords— Piezoresistor, cantilevers, sensitivity, Surface