On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves | Zendy

Pavel S. Marinushkin | Zendy; Alexey Levitsky | Zendy; Fedor G. Zograf | Zendy; Valentina A. Bakhtina | Zendy

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On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves

Author(s) -

Pavel S. Marinushkin,

Alexey Levitsky,

Fedor G. Zograf,

Valentina A. Bakhtina

Publication year - 2020

Publication title -

informacije midem - journal of microelectronics electronic components and materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.122

H-Index - 18

eISSN - 1855-4709

pISSN - 0352-9045

DOI - 10.33180/infmidem2020.303

Subject(s) - resonator , acoustics , coupling coefficient of resonators , materials science , microelectromechanical systems , lamb waves , electromechanical coupling coefficient , resonance (particle physics) , finite element method , acoustic wave , coupling (piping) , piezoelectricity , phase velocity , quality (philosophy) , excitation , q factor , acoustic resonance , physics , optics , optoelectronics , wave propagation , composite material , particle physics , quantum mechanics , thermodynamics

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