Open AccessOn the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves
Author(s) -
Pavel S. Marinushkin,
Alexey Levitsky,
Fyodor Zograf,
Valentina A. Bakhtina
Publication year - 2020
Publication title -
informacije midem
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.122
H-Index - 18
eISSN - 1855-4709
pISSN - 0352-9045
DOI - 10.33180/infmidem2020.303
Subject(s) - resonator , acoustics , coupling coefficient of resonators , materials science , microelectromechanical systems , lamb waves , electromechanical coupling coefficient , resonance (particle physics) , finite element method , acoustic wave , coupling (piping) , piezoelectricity , phase velocity , quality (philosophy) , excitation , q factor , acoustic resonance , physics , optics , optoelectronics , wave propagation , composite material , particle physics , quantum mechanics , thermodynamics