Open AccessRecent Advances in Organic-inorganic Hybrid Photoresists
Author(s) -
Wenwen Wang,
Xindi Yao,
Huiwen An,
Yake Wang,
Jinping Chen,
Shuangqing Wang,
Xudong Guo,
Tianjun Yu,
Yi Zeng,
Guoqiang Yang,
Yi Li
Publication year - 2021
Publication title -
journal of microelectronic manufacturing
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.21040101
Subject(s) - nanotechnology , materials science , chemistry