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Pattern-Centric Computational System for Logic and Memory Manufacturing and Process Technology Development
Author(s) -
Chenmin Hu,
Santa Clara Anchor Semiconductor,
Khurram Zafar,
Abhishek Vikram,
Geoffrey Ying
Publication year - 2020
Publication title -
journal of microelectronic manufacturing
Language(s) - English
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.20030410
Subject(s) - computer science , process (computing) , development (topology) , computer architecture , systems engineering , manufacturing engineering , engineering , programming language , mathematics , mathematical analysis

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