Open AccessMachine Learning based Optical Proximity Correction Techniques
Author(s) -
Pengpeng Yuan,
Taian Fan,
Yaobin Feng,
Peng Xu,
Yayi Wei
Publication year - 2020
Publication title -
journal of microelectronic manufacturing
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.20030408
Subject(s) - computer science , artificial intelligence , human–computer interaction