Open AccessMaterial Modeling in Semiconductor Process Applications
Author(s) -
Boris A. Voinov,
P. Keys,
McLaughlin Stephen,
Ananth P. Kaushik,
M. Stettler
Publication year - 2020
Publication title -
journal of microelectronic manufacturing
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.20030406
Subject(s) - process (computing) , semiconductor , computer science , materials science , optoelectronics , programming language