Open AccessNovel Pattern-Centric Solution for XtackingTM AFM Metrology
Author(s) -
Sicong Wang,
. Yangtze Memory Technologies Co,
Mi Jing,
Abhishek Vikram,
Xu Gao,
Guojie Chen,
Liming Zhang,
Pan Liu
Publication year - 2019
Publication title -
journal of microelectronic manufacturing
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.19020403
Subject(s) - atomic force microscopy , metrology , nanotechnology , materials science , optics , physics