Open AccessHotspot Detection of Semiconductor Lithography Circuits Based on Convolutional Neural Network Generalized Euler'Constant Family
Author(s) -
Xingyu Zhou,
Yang Yu
Publication year - 2018
Publication title -
journal of microelectronic manufacturing
Language(s) - English
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.18010205
Subject(s) - convolutional neural network , euler's formula , constant (computer programming) , hotspot (geology) , lithography , electronic circuit , semiconductor , biological neural network , computer science , physics , mathematics , optoelectronics , artificial intelligence , mathematical analysis , machine learning , quantum mechanics , geophysics , programming language