Open AccessCompressive Sensing Approaches for Lithographic Source and Mask Joint Optimization Generalized Euler'Constant Family
Author(s) -
Xu Ma,
Zhiqiang Wang,
Gonzalo R. Arce
Publication year - 2018
Publication title -
journal of microelectronic manufacturing
Language(s) - English
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.18010202
Subject(s) - constant (computer programming) , joint (building) , euler's formula , lithography , computer science , mathematical analysis , mathematical optimization , mathematics , physics , structural engineering , optics , engineering , programming language