Open AccessPreparation of Double-sided Nanostructure Based on Soft-nanoimprinting Lithography Generalized Euler'Constant Family
Author(s) -
Man Zhang,
Qiling Deng,
Hui Pang,
Lei Shi,
Axiu Cao
Publication year - 2018
Publication title -
journal of microelectronic manufacturing
Language(s) - English
Resource type - Journals
ISSN - 2578-3769
DOI - 10.33079/jomm.18010201
Subject(s) - nanostructure , constant (computer programming) , lithography , materials science , euler's formula , nanolithography , soft lithography , nanotechnology , mathematics , optoelectronics , computer science , mathematical analysis , medicine , programming language , alternative medicine , pathology , fabrication