Open AccessDouble-beam FiB-SEM: applications and possibilities
Author(s) -
M.V. Lukashova,
Tescan
Publication year - 2020
Language(s) - English
DOI - 10.32757/2619-0923.2020.3-4.13.20.28
Subject(s) - focused ion beam , materials science , nanotechnology , beam (structure) , engineering physics , optics , physics , ion , quantum mechanics