Open AccessEFFECT OF MAGNETRON SPUTTERING MODES ON THE FORMATION AND COMPOSITION OF TiCN COATINGS
Author(s) -
Бахытулы Наурызбек,
Мамаева Аксауле Алиповна,
Кенжегулов Айдар Караулович,
Александр Владимирович Паничкин
Publication year - 2022
Publication title -
internauka
Language(s) - English
Resource type - Journals
eISSN - 2687-0142
pISSN - 2542-0348
DOI - 10.32743/26870142.2022.37.260.345662
Subject(s) - cavity magnetron , materials science , sputter deposition , composition (language) , sputtering , metallurgy , nanotechnology , thin film , art , literature