Open AccessMAGNETRON DEPOSITION OF ANODE FUNCTIONAL LAYERS FOR SOLID OXIDE FUEL CELLS
Author(s) -
A. A. Solovyev,
И. В. Ионов,
А. В. Шипилова,
V. A. Semenov,
Egor Smolyanskiy
Publication year - 2019
Publication title -
kimya problemləri
Language(s) - English
Resource type - Journals
eISSN - 2522-1655
pISSN - 2221-8688
DOI - 10.32737/2221-8688-2019-2-252-266
Subject(s) - anode , materials science , deposition (geology) , cavity magnetron , sputter deposition , oxide , chemical engineering , fuel cells , nanotechnology , thin film , metallurgy , chemistry , sputtering , electrode , engineering , geology , paleontology , sediment