Open AccessINITIAL DEFORMATION OF SINX/AL CANTILEVERS ACCORDING TO THERMAL BUDGET FOR MEMS SENSORS
Author(s) -
G. A. Rudakov,
R.Z. Khafizov
Publication year - 2018
Publication title -
izvestiâ vysših učebnyh zavedenij rossii. radioèlektronika
Language(s) - English
Resource type - Journals
eISSN - 2658-4794
pISSN - 1993-8985
DOI - 10.32603/1993-8985-2018-21-4-47-56
Subject(s) - residual stress , materials science , annealing (glass) , microelectromechanical systems , composite material , ultimate tensile strength , deformation (meteorology) , deposition (geology) , nanotechnology , paleontology , sediment , biology