Open AccessThe photoluminescence of nitrogen-implanted silicon nitride films
Author(s) -
Danatbek Murzalinov,
Л. А. Власукова,
И. Н. Пархоменко,
Ф. Ф. Комаров,
A. Аkilbekov,
А. В. Мудрый,
Yu. A. Ryabikin,
Sh. Giniyatova,
А. Dauletbekova
Publication year - 2018
Publication title -
l.n. gumilev atyndaġy euraziâ u̇lttyk̦ universitetìnìn̦ habaršysy. fizika, astronomiâ seriâsy
Language(s) - English
Resource type - Journals
eISSN - 2663-1296
pISSN - 2616-6836
DOI - 10.32523/2616-6836-2018-122-1-68-74
Subject(s) - photoluminescence , materials science , silicon nitride , nitride , nitrogen , silicon , optoelectronics , nanotechnology , chemistry , layer (electronics) , organic chemistry