Open AccessSTRUCTURE AND ELECTROCHROMIC OF VANADIUM PENTOXIDE THINFILMS PREPARED BY MAGNETRON DC SPUTTERING AT ROOM TEMPERATURE
Author(s) -
Hieu Van Le,
Tuan T. Tran,
Hao Duc Nguyen,
Hien Quang Tran
Publication year - 2011
Publication title -
khoa học công nghệ
Language(s) - English
Resource type - Journals
ISSN - 1859-0128
DOI - 10.32508/stdj.v14i4.2028
Subject(s) - electrochromism , pentoxide , vanadium , materials science , sputter deposition , transmittance , raman spectroscopy , sputtering , lithium (medication) , analytical chemistry (journal) , thin film , chemical engineering , optoelectronics , optics , nanotechnology , chemistry , organic chemistry , metallurgy , electrode , engineering , physics , endocrinology , medicine
Vanadium pentoxide (V2O5) electrochromic thinfilms have been manufactured by magnetron DC sputtering method from Vanadium target (99.5% purity) in compound of O2 and Ar gases. In especially, films have crystalline structure at low depositing temperature (room temperature), which has been defined by XRD, Raman spectrum and SEM figure. The optical property of films has been investigated by transmittance – absorption spectroscopy. Moreover, electrochemic and electrochromic properties of films have been examined. As the result, films have high transmittance (>70%), low crystalline structure, high insertion lithium ability and stability with many electrochemic cycles. With these high properties, V2O5 sputtering thinfilms have capability to be used in application.