HETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE | Zendy

Ngoc Van Le | Zendy; Vinh Cao Trần | Zendy; Tuan Tran | Zendy; Đạt Thành Huỳnh | Zendy; Phuong Ai Duong | Zendy; Toai Quang Le | Zendy; Hoa Van Bach | Zendy

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HETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE

Author(s) -

Ngoc Van Le,

Vinh Cao Trần,

Tuan Tran,

Đạt Thành Huỳnh,

Phuong Ai Duong,

Toai Quang Le,

Hoa Van Bach

Publication year - 2009

Publication title -

science and technology development journal

Language(s) - English

Resource type - Journals

ISSN - 1859-0128

DOI - 10.32508/stdj.v12i12.2314

Subject(s) - materials science , sputtering , lattice (music) , layer (electronics) , sputter deposition , orientation (vector space) , optoelectronics , composite material , thin film , nanotechnology , geometry , physics , mathematics , acoustics

WO3 films were deposited by rf magnetron sputtering method onto ITO(400)-coated glass substrates. Experiments showed that the growth orientation of WO3 crystalline lattice depends on the thickness of ITO layer. In this paper, this dependence will be discussed further.

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