Open AccessHETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE
Author(s) -
Ngoc Tuan Le,
Vinh Cao Trần,
Tuan T. Tran,
Duy C. Huynh,
Phuong Ai Duong,
Toai Quang Le,
Hoa Van Bach
Publication year - 2009
Publication title -
khoa học công nghệ
Language(s) - English
Resource type - Journals
ISSN - 1859-0128
DOI - 10.32508/stdj.v12i12.2314
Subject(s) - materials science , sputtering , lattice (music) , layer (electronics) , sputter deposition , orientation (vector space) , optoelectronics , composite material , thin film , nanotechnology , geometry , physics , mathematics , acoustics
WO3 films were deposited by rf magnetron sputtering method onto ITO(400)-coated glass substrates. Experiments showed that the growth orientation of WO3 crystalline lattice depends on the thickness of ITO layer. In this paper, this dependence will be discussed further.