Open AccessCharacterizatioin of HF/H₂O vapor phase etching of SiO₂
Author(s) -
Bang V. Bui
Publication year - 2019
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31979/etd.duc7-ku8q
Subject(s) - vapor phase , etching (microfabrication) , materials science , phase (matter) , composite material , chemistry , physics , thermodynamics , organic chemistry , layer (electronics)