Open AccessPlanar Reactive Magnetron Sputtering to Obtain Dielectrics and Transparent Conductive Thin Films
Author(s) -
Marina Kipiani
Publication year - 2020
Publication title -
international journal of new technology and research
Language(s) - English
Resource type - Journals
ISSN - 2454-4116
DOI - 10.31871/ijntr.6.6.11
Subject(s) - materials science , optoelectronics , planar , electrical conductor , dielectric , sputter deposition , sputtering , thin film , cavity magnetron , high power impulse magnetron sputtering , nanotechnology , composite material , computer science , computer graphics (images)