Open AccessDirect femtosecond-laser projection lithography on perovskites for advanced nanophotonic applications
Author(s) -
A. A. Kuchmizhak,
Alexey Zhizhchenko,
С. В. Макаров
Publication year - 2020
Publication title -
9-й международный семинар по волоконным лазерам: материалы семинара
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31868/rfl2020.149
Subject(s) - nanophotonics , femtosecond , materials science , lithography , optoelectronics , laser , optics , nanotechnology , physics