Open AccessCROSS-SECTIONAL QUASI-LAMÉ MODES IN THIN-FILM PIEZOELECTRIC-ON-SILICON RESONATORS
Author(s) -
Sarah Shahraini,
Hediyeh Fatemi,
Reza Abdolvand
Publication year - 2018
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.98
Subject(s) - resonator , silicon on insulator , silicon , materials science , piezoelectricity , q factor , optoelectronics , substrate (aquarium) , acoustics , physics , composite material , oceanography , geology
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