Open AccessCROSS-SECTIONAL QUASI-LAMÉ MODES IN THIN-FILM PIEZOELECTRIC-ON-SILICON RESONATORS
Author(s) -
Sarah Shahraini,
Hedy Fatemi,
Reza Abdolvand
Publication year - 2018
Publication title -
2018 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2018.98
Subject(s) - resonator , silicon , piezoelectricity , materials science , optoelectronics , acoustics , physics , composite material